MEMS(Micro-Electro-Mechanical Systems)

MEMS(Micro-Electro-Mechanical Systems) is the American way, in Japan called micro mechanical in Europe called micro system, it is a mass produced, set miniature institutions, miniature sensors, micro actuators and signal processing and control circuit, until interface, communications and power equal to a tiny device or system. MEMS is as semiconductor integrated circuit microfabrication technology and ultra precision machining technology development and develops, currently MEMS processing technology is widely applied to microfluidic chips and synthetic biology, etc, thus biological chemistry laboratory technology process chip integration.

introduction

By using photolithography and wafer MEMS anisotropic etching process manufacturing and into, small size, light weight with, low cost, high reliability, strong ability to fight oscillatory impact and is easily batch production, etc.

part

MEMS mainly includes miniature institutions, miniature sensors, micro actuators and corresponding processing circuit, it is several sections in the mixture of various microfabrication techniques, and applied the latest achievements of modern information technology developed on the basis of high-tech frontier disciplines.

influence

MEMS technology development has opened up a whole new technology field and industry, use MEMS technology making micro sensors, micro actuators, miniature components, micro mechanical optics, vacuum microelectronics devices, power electronic devices, etc in aviation, aerospace, automotive, biological medicine, environmental monitoring, military and almost all contact with the people in the field are has the very broad application prospect. MEMS technology is developing into a huge industry, like nearly 20 years microelectronic industry and computer industry brings human as the great change, MEMS are also conceived a profound changes in technology and produced a new round of the influence of human society. Currently the leading products for MEMS market pressure sensor, accelerometer, micro gyroscope, ink wards and hard disk drive top. Most industry observers predict, the next five years will show the sales MEMS devices, the trend of rapid growth in the annual average increase rate at about 18%, therefore over-indulgence mechanical electronics engineering, precision machinery and equipment, semiconductor physics, and other disciplines development provides excellent opportunities and severe challenges.

Development outline

MEMS is a kind of brand-new also have to consider the various physical fields of the mixing action research fields, compared with the traditional mechanical, their size smaller, the biggest no more than a centimeter, even just for a few microns, its thickness is more remote. Adopts of silicon-based materials, electrical capability fine, silicone material strength, hardness and young's modulus and iron quite, density and aluminum similar, heat conductivity near molybdenum and tungsten. Adopt and integrated circuit (IC) similar generation technology using IC production, the mature of technology, process, high-volume, low-cost production, make cost-effective compared with the traditional "machinery" manufacturing technology greatly improved.

Complete MEMS sensor, micro is composed of micro actuators, signal processing and control circuit, communication interface and power components and other parts of the integration of miniature device system. The goal is to turn information acquisition, processing and implement integrated together, form a multi-function miniature system, integrated big size system, thus greatly improving the system of automation, intelligent and reliability level.

Along the system and product miniaturization, intelligence, integration development direction, predictable: MEMS will give the human society brings another technology revolution, it will work against the 21st century science and technology, production method and far-reaching influence human production quality, is related to the national science and technology development, national defense and economic prosperity of a key technology.

Manufacturers are handheld devices, providing perfect smaller size and function more products. But the paradox is that as technology improvement, prices are often also can appear surged, therefore this led to a question: manufacturers have to face conflicting requirements - in let product function super and reduce its costs.

To solve this problem is one of the methods by microelectromechanical system, more popular tale is MEMS, it makes a product manufacturers can all functional integration into a single chip. MEMS on consumer electronic products include not only the ultimate impact cost, but also includes without sacrificing performance in under the condition of the decrease of the size and weight of realization. In fact, most consumer electronics products used MEMS devices than the performance of similar technology has been greatly improved.

Handheld device makers are gradually realize the value of this technology and MEMS - the benefits of mass, low cost, small size, and begins to turn successful MEMS company, its realization cost cuts will affect the amplitude, the consumer electronics world, and not just the high-end device. MEMS in throughout the 1990s are dominated by automobile industry; In the past few years, because of the emergence of Wii and iPhone, putting the engineers see motion sensor bring innovation, make the consumer electronics industry appear MEMS explosion growth, become change user experience and realize end product key elements of product differentiation.

Development history

MEMS first-round commercial tide began in the late 1970s in the early 1980s, when using large etch wafers structure and diaphragm production pressure sensor back etching. With thin wafers vibrating membrane deformation under pressure, will affect its surface thermistors curve, this change can put pressure into electrical signal. Later circuit consists of capacitance move quality accelerometer, to trigger automobile airbag and positioning the gyro.

Second round of commercialized appeared in the 1990s, mainly around the PC and the rise of information technology. TI company according to electrostatic drive inclined micromirror array launched a projector, and thermal type ink-jet printing head still flourishing.

The third round of the century, commercialization can say appeared in the diffractive optical switch device through and related devices all become optical fiber communication supplement. Although the market now depression, but micro-optics devices from the long term will be a growth strong field MEMS.

Currently the new trend of MEMS industry is presented, the expansion of products applied to industrial, medical and start new field test instrument expansion. Promote the fourth round the other applications include some commercial for rf passive components, made in silicon including audio, biological and neurons, and the so-called 'probe on-chip laboratory' biochemical drugs development system and micro drug transport system static and mobile devices.