MEMS ( Micro-Electro-Mechanical Systems )

MEMS ( Micro-Electro-Mechanical Systems ) refers to the mass manufacture, miniature institutions, miniature sensors, micro actuators and signal processing and control circuit, and interface, communication and power is a miniature device or system. MEMS is with the semiconductor integrated circuit microfabrication technology and ultra-precision machining technology develops, at present MEMS processing technique has been widely used in microfluidic chip and synthetic biology, and biochemistry laboratory technical process of chip integration.

MEMS micro-electro-mechanical system. MEMS include micro mechanism, micro sensors, micro actuators and the corresponding processing circuit etc., it is in the integration of a variety of fine processing technology, and the application of modern information technology on the basis of the latest results developed high-tech cutting-edge disciplines.

The development of MEMS technology has opened up a new field of technology and industry, the MEMS production technology of micro sensors, actuators, micro component, micromachined optical devices, vacuum microelectronic devices, power electronic devices such as aviation, aerospace, automotive, in biomedicine, environmental monitoring, military and people have access to almost all in the field have very broad application prospects. MEMS technology is developing into a huge industry, as nearly 20 years of microelectronics industry and the computer industry has brought tremendous change, MEMS is also bred a profound technological change and human society caused a new round of influence. The current MEMS market leading products for pressure sensor, accelerometer, gyroscope, ink nozzle and hard disk drive head. Most industry observers predicted, future 5 years MEMS device sales will show rapid growth trend, the average annual increase rate is about 18%, so the mechanical electronic engineering, precision machinery and apparatus, semiconductor physics development provides a good opportunity and severe challenge.

Microelectromechanical systems ( Micro-Electro-Mechanical MEMS Systems ) is a kind of brand-new must simultaneously consider a variety of physical field mixing R & D field, compared with the traditional mechanical, their smaller size, maximum of no more than a centimeter, even only a few microns, its thickness is more small. Using silicon-based materials, excellent electrical performance, silicon material strength, hardness and Young's modulus and equivalent density and similar iron, aluminum, heat conduction rate close to molybdenum and tungsten. With the integrated circuit ( IC ) similar to the generating technology, can use large amount of IC in the production of mature technology, process, high-volume, low cost of production, the price relative to the traditional" mechanical" manufacturing technology greatly improved.

A complete MEMS is composed of micro sensors, actuators, signal processing and control circuit, communication interface and power supply and other components of the integration of the micro device system. Its goal is to put the information acquisition, processing and implementation of integrated together, which has the advantages of multiple functions of micro system, integrated in the large size of the system, so as to greatly improve system automation, intelligent and reliability level.